S. Soumya (Author), R. Arun Kumar (Author), S. Sreejyothi (Author), Vimal Raj (Author), Mohanachandran Nair Sindhu Swapna (Author), Sankaranarayana Iyer Sankararaman (Author)

Abstract

Film quality analysis is of more considerable signifcance due to its diversifed applications in various felds of technology. The present work reports the speckle interferometric analysis of the argon pressure-induced surface roughness modifcations of RF sputtered MoO3 flms. The paper suggests a new method of surface quality analysis of thin flms through a parameter δ, which is the diference between the initial and fnal inertia moment values in the study of the thermal-induced dynamic speckle pattern. The limitations of root mean square surface roughness analysis of the atomic force microscopic image of the flms is also exemplifed. The research suggests that argon pressure plays a vital role in the surface property of RF sputtered flms and also that the dynamic speckle analysis can give precise information about the quality of flms. The contour plot of particle displacement vector under thermal stress, suggests the degree of uniformity in the distribution of particles in the flm.

Keywords

speckle patterns;interferometry;time history;cross correlation;inertia moment;

Data

Language: English
Year of publishing:
Typology: 1.01 - Original Scientific Article
Organization: UNG - University of Nova Gorica
UDC: 53
COBISS: 113770499 Link will open in a new window
ISSN: 0195-9298
Views: 501
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Other data

URN: URN:SI:UNG
Pages: str. 1-9
Volume: ǂVol. ǂ40
Issue: ǂno. ǂ1
Chronology: 2021
DOI: 10.1007/s10921-020-00741-x
ID: 15822808