ToF-SIMS depth profiling of metal, metal oxide, and alloy multilayers in atmospheres of H[sub]2, C[sub]2H[sub]2, CO, and O[sub]2

Jernej Ekar (Author), Peter Panjan (Author), Sandra Drev (Author), Janez Kovač (Author)

Abstract

No abstract data available

Ions;Layers;Mass spectrometry;Metals;Oxides;SIMS depth profiling H2 C2H2 CO and O2 atmosphere gas flooding cluster secondary ions matrix effect;

Language:	English
Year of publishing:	2022
Typology:	1.01 - Original Scientific Article
Organization:	IJS - Jožef Stefan Institute
Publisher:	ACS Publications
UDC:	53
COBISS:	90990339
ISSN:	1879-1123
Views:	6
Downloads:	0
Average score:	0 (0 votes)
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Source comment:	Nasl. z nasl. zaslona; Opis vira z dne 27. 12. 2021;
Pages:	str. 31-44
Volume:	ǂVol. ǂ33
Issue:	ǂiss. ǂ1
Chronology:	2022
DOI:	10.1021/jasms.1c00218
ID:	20349896