AFM study of roughness development during ToF-SIMS depth profiling of multilayers with a Cs[sup]+ ion beam in a H[sub]2 atmosphere
Abstract
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Data
| Language: | English |
|---|---|
| Year of publishing: | 2022 |
| Typology: | 1.01 - Original Scientific Article |
| Organization: | IJS - Jožef Stefan Institute |
| Publisher: | ACS Publications |
| UDC: | 53 |
| COBISS: |
128549635
|
| ISSN: | 0743-7463 |
| Views: | 4 |
| Downloads: | 1 |
| Average score: | 0 (0 votes) |
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Other data
| Pages: | str. 12871–12880 |
|---|---|
| Volume: | ǂVol. ǂ38 |
| Issue: | ǂno. ǂ 42 |
| Chronology: | 2022 |
| DOI: | 10.1021/acs.langmuir.2c01837 |
| ID: | 20349898 |
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