ǂThe ǂeffect of surface preparation on the protective properties of A[sub]l2O[sub]3 and HfO[sub]2 thin films deposited on cp-titanium by atomic layer deposition
Abstract
The effect of surface preparation on the protective properties of ▫$Al_2O_3$▫ and ▫$HfO_2$▫ thin films deposited on cp-titanium by atomic layer deposition
Keywords
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Data
| Language: | English |
|---|---|
| Year of publishing: | 2021 |
| Typology: | 1.01 - Original Scientific Article |
| Organization: | IJS - Jožef Stefan Institute |
| Publisher: | Elsevier |
| UDC: | 54 |
| COBISS: |
37347587
|
| ISSN: | 0013-4686 |
| Views: | 445 |
| Downloads: | 173 |
| Average score: | 0 (0 votes) |
| Metadata: |
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Other data
| Pages: | str. 137431-1-137431-16 |
|---|---|
| Volume: | ǂVol. ǂ366 |
| Chronology: | 2021 |
| DOI: | 10.1016/j.electacta.2020.137431 |
| ID: | 26357065 |
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