Gradnja 3D mikrostruktur

diplomsko delo

Boštjan Namar (Author), Riko Šafarič (Mentor), Karl Gotlih (Mentor)

Abstract

Nanorobotika kot ena izmed tehnik mladega in še dokaj neraziskanega področja zajema premikanje in gradnjo 3D-mikrostruktur s tako imenovanim postopkom ‘’pick and place’’. Sam postopek poteka s premikanjem zlate konice znotraj vakuumske komore, kjer se nahajajo objekti za sestavo mikrostrukture. Pri tem so v veliko pomoč tudi van der Waalsove sile, ki se ustvarijo med objekti in samo gradnjo deloma tudi olajšajo. V diplomskem delu je gradnja 3D-mikrostruktur prikazana preko dokazovanja, ali se v vakuumski komori pri tlaku okoli 150 µbar res lahko sestavi objekt iz silicijeve osi s približnim premerom 10 µm ter zobnika, katerega luknja za osovino je premera približno 10 µm, pri čemer sta uporabljena dva načina, in sicer vstavljanje osi v zobnik in natikanje zobnika na samo os.

Keywords

nanorobotika;van der Waalsova sila;mikrostrukture;diplomske naloge;

Data

Language:	Slovenian
Year of publishing:	2014
Typology:	2.11 - Undergraduate Thesis
Organization:	UM FERI - Faculty of Electrical Engineering and Computer Science
Publisher:	[B. Namar]
UDC:	007.52:620.3(043.2)
COBISS:	18488598
Views:	1147
Downloads:	57
Average score:	0 (0 votes)
Metadata:

Other data

Secondary language:	English
Secondary title:	Building of 3D microstructures
Secondary abstract:	Nanorobotics is a technique, within young and relatively unexplored area, which includes moving and construction of 3D microstructures with a process ''pick and place''. The process ''pick and place'' involves moving of the golden robot finger’s tip in the vacuum chamber, where are objects for construction of 3D microstructures. In doing so, there are used van der Waals forces, which attract micro objects between themselves to allow construct the microstructure. In thesis, I would like to prove, that in a vacuum chamber at a pressure of about 150 μbar can be possible to construct a 3D microstructure of silicon axis with an approximate diameter of 10 μm and a sprocket, which hole for axis has a diameter of about 10 μm. This I will attempt to prove on two ways, with inserting silicon axis in the sprocket and with attaching the sprocket on the silicon axis.
Secondary keywords:	nanorobotic;van der Waals forces;microstructures;
URN:	URN:SI:UM:
Type (COBISS):	Bachelor thesis/paper
Thesis comment:	Univ. v Mariboru, Fak. za strojništvo
Pages:	V, 21 str.
ID:	8730710