Kostja Makarovič (Avtor), Darko Belavič (Avtor), Matjaž Vidmar (Avtor), Barbara Malič (Avtor)

Povzetek

The design, fabrication and functional evaluation of the radio-frequency dielectric heating of liquids in an LTCC-based ceramic microfluidic system are described and discussed. The device, which relies on the dielectric heating of liquids, was fabricated using a low temperature co-fired ceramic (LTCC) technology. A multilayered ceramic structure with integrated electrodes, buried channels and cavities in micro and millimetre scales was fabricated. The structure with the dimensions of 35 mm × 22 mm × 2.4 mm includes a buried cavity with a diameter of 17.3 mm and a volume of 0.3 mL. The top and bottom faces of the cavity consist of silver/palladium electrodes protected with 100 µm thick layers of LTCC. The power, used to heat a polar liquid (water) in the cavity with the volume of 0.3 mL, ranges from 5 to 40 W. This novel application of RF dielectric heating could enable the miniaturization of microfluidic systems in many applications. The working principle of such a device and its efficiency are demonstrated using water as the heated medium.

Ključne besede

ceramic microsystem;microfluidics;LTCC;RF dielectric heating;

Podatki

Jezik: Angleški jezik
Leto izida:
Tipologija: 1.01 - Izvirni znanstveni članek
Organizacija: UL FE - Fakulteta za elektrotehniko
UDK: 666
COBISS: 87578371 Povezava se bo odprla v novem oknu
ISSN: 1996-1944
Št. ogledov: 81
Št. prenosov: 36
Ocena: 0 (0 glasov)
Metapodatki: JSON JSON-RDF JSON-LD TURTLE N-TRIPLES XML RDFA MICRODATA DC-XML DC-RDF RDF

Ostali podatki

Vrsta dela (COBISS): Članek v reviji
Strani: str. 7396-1-7396-8
Letnik: ǂVol. ǂ14
Zvezek: ǂno. ǂ23
Čas izdaje: 2021
DOI: 10.3390/ma14237396
ID: 15327516