S. Soumya (Avtor), R. Arun Kumar (Avtor), S. Sreejyothi (Avtor), Vimal Raj (Avtor), Mohanachandran Nair Sindhu Swapna (Avtor), Sankaranarayana Iyer Sankararaman (Avtor)

Povzetek

Film quality analysis is of more considerable signifcance due to its diversifed applications in various felds of technology. The present work reports the speckle interferometric analysis of the argon pressure-induced surface roughness modifcations of RF sputtered MoO3 flms. The paper suggests a new method of surface quality analysis of thin flms through a parameter δ, which is the diference between the initial and fnal inertia moment values in the study of the thermal-induced dynamic speckle pattern. The limitations of root mean square surface roughness analysis of the atomic force microscopic image of the flms is also exemplifed. The research suggests that argon pressure plays a vital role in the surface property of RF sputtered flms and also that the dynamic speckle analysis can give precise information about the quality of flms. The contour plot of particle displacement vector under thermal stress, suggests the degree of uniformity in the distribution of particles in the flm.

Ključne besede

speckle patterns;interferometry;time history;cross correlation;inertia moment;

Podatki

Jezik: Angleški jezik
Leto izida:
Tipologija: 1.01 - Izvirni znanstveni članek
Organizacija: UNG - Univerza v Novi Gorici
UDK: 53
COBISS: 113770499 Povezava se bo odprla v novem oknu
ISSN: 0195-9298
Št. ogledov: 501
Št. prenosov: 0
Ocena: 0 (0 glasov)
Metapodatki: JSON JSON-RDF JSON-LD TURTLE N-TRIPLES XML RDFA MICRODATA DC-XML DC-RDF RDF

Ostali podatki

URN: URN:SI:UNG
Strani: str. 1-9
Letnik: ǂVol. ǂ40
Zvezek: ǂno. ǂ1
Čas izdaje: 2021
DOI: 10.1007/s10921-020-00741-x
ID: 15822808