ǂThe ǂeffect of surface preparation on the protective properties of A[sub]l2O[sub]3 and HfO[sub]2 thin films deposited on cp-titanium by atomic layer deposition
Povzetek
The effect of surface preparation on the protective properties of ▫$Al_2O_3$▫ and ▫$HfO_2$▫ thin films deposited on cp-titanium by atomic layer deposition
Ključne besede
Ni podatka o ključnih besedah
Podatki
| Jezik: | Angleški jezik |
|---|---|
| Leto izida: | 2021 |
| Tipologija: | 1.01 - Izvirni znanstveni članek |
| Organizacija: | IJS - Institut Jožef Stefan |
| Založnik: | Elsevier |
| UDK: | 54 |
| COBISS: |
37347587
|
| ISSN: | 0013-4686 |
| Št. ogledov: | 445 |
| Št. prenosov: | 173 |
| Ocena: | 0 (0 glasov) |
| Metapodatki: |
|
Ostali podatki
| Strani: | str. 137431-1-137431-16 |
|---|---|
| Letnik: | ǂVol. ǂ366 |
| Čas izdaje: | 2021 |
| DOI: | 10.1016/j.electacta.2020.137431 |
| ID: | 26357065 |
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