Bruno Cvikl (Author)

Abstract

V članku je opisan postopek naparjevanja tankih plasti po metodi curka ioniziranih skupkov, ki rabi za nizkotemperaturno nanašanje in epitakso visokokvalitetnih tankih plasti.

Keywords

vakuumska tehnika;CIS;curek ioniziranih skupkov;tanke plasti;

Data

Language: Slovenian
Year of publishing:
Typology: 1.01 - Original Scientific Article
Organization: UM FGPA - Faculty of Civil Engineering, Transportation Engineering and Architecture
Publisher: Društvo za vakuumsko tehniko Slovenije
UDC: 539.216:539.23
COBISS: 4402180 Link will open in a new window
ISSN: 0351-9716
Parent publication: Vakuumist
Views: 1127
Downloads: 26
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Other data

Secondary language: Unknown
Secondary title: Ionized cluster beam thin film deposition, ICB.
Secondary abstract: The description of the method for the thermal vacuum evaporation of suitable substance, used for the low temperature deposition and epitaxy of high-qualitythin films by the ionized cluster beam method (ICB), is presented.
Secondary keywords: vacuum techniques;ICB;ionized cluster beam;thin films;
URN: URN:NBN:SI
Type (COBISS): Not categorized
Pages: str. 15-20
Volume: ǂVol. ǂ29
Issue: ǂno. ǂ4
Chronology: 1992
ID: 1754754