magistrsko delo
Povzetek
Na delovnih mestih je v zraku prisotnih veliko trdnih delcev različnega izvora,
ki lahko škodljivo vplivajo na zdravje delavcev. V magistrskem delu smo obravnavali
delce nastale v prototipni laserski komori pri laserski ablaciji materiala galijevega
arzenida (GaAs) z uporabo nano- in pikosekundnega laserja v lasti visokotehnološkega
podjetja LPKF Laser & Electronics d.o.o. V teoretičnem delu so predstavljeni teoretično
ozadje problema, bistvene fizikalno-kemijske lastnosti nanodelcev za opredelitev
nevarnosti in škodljivih učinkov na zdravje, relevantni zakonski predpisi ter tehnični
ukrepi za omejitev izpostavljenosti nanodelcem na delovnem mestu. V eksperimentalnem
delu so podrobneje opisani vzorčenje in analiza delcev ter ocena izpostavljenosti delavcev
med procesom laserske ablacije. Meritve delcev smo izvedli s pomočjo zajetja delcev po
principu impakcije. Za ta namen smo kot vzorčevalnik uporabili 10-stopenjski nizkotlačni
Bernerjev kaskadni impaktor, skozi katerega smo črpali zrak in na folijah zajeli delce
različnih velikosti. Delcem, ki so se ujeli glede na velikost na posamezni stopnji, smo s
tehtanjem določili maso in s tem tudi masno koncentracijo posamezne frakcije delcev v
kubičnem metru zraka. Osredotočili smo se predvsem na delce pod 100 nm, ki smo jih
zajeli na 1. in 2. stopnji kaskadnega impaktorja. Za opredelitev nevarnosti ob potencialni
izpostavljenosti nanodelcem, nastalih med lasersko ablacijo, smo delce preučili tudi z
vrstično elektronsko mikroskopijo (SEM), opremljeno z energijsko disperzijskim
rentgenskim detektorjem (EDS). Z uporabo SEM-EDS analize smo analizirali velikost,
obliko in elementno sestavo delcev. Velikost ustvarjenih delcev je bila večinoma pod 300
nm. Pri laserski ablaciji so nastajali aglomerati in agregati kondenzacijskih delcev. Galij
(Ga) in arzen (As) sta bila glavna elementa v nastalih delcih pri laserski ablaciji materiala
GaAs. Opazili smo tudi nastanek kristalov arzenovega oksida (As$_2$O$_3$). Ugotovili smo, da
je potencialna izpostavljenost delavcev delcem majhna. To ni presenetljiv rezultat, saj je
laserska ablacija potekala v zaprtem sistemu (tj. laserski komori), ki vključuje točkovno
odvajanje zraka nad lasersko mizico in visokozmogljiv filtrirni sistem. Na podlagi
ugotovitev smo identificirali pomanjkljivosti oz. izzive, s katerimi se srečujejo v podjetju
pri procesu laserske ablacije, ter predlagali možne izboljšave in podali napotke za varno
delo v obliki smernic.
Ključne besede
laserska ablacija;toksikokinetika nanodelcev;galijev arzenid;ocena tveganja;obvladovanje tveganja;zakonski predpisi;magistrska dela;
Podatki
Jezik: |
Slovenski jezik |
Leto izida: |
2024 |
Tipologija: |
2.09 - Magistrsko delo |
Organizacija: |
UL FKKT - Fakulteta za kemijo in kemijsko tehnologijo |
Založnik: |
[A. Kočman] |
UDK: |
331.45:620.3(043.2) |
COBISS: |
200887555
|
Št. ogledov: |
52 |
Št. prenosov: |
15 |
Ocena: |
0 (0 glasov) |
Metapodatki: |
|
Ostali podatki
Sekundarni jezik: |
Angleški jezik |
Sekundarni naslov: |
Hazard assessment of nanoparticles in the laser ablation process |
Sekundarni povzetek: |
Many solid particles of various origins are present in the workplace air, which
can have a harmful effect on the health of workers. In the master's thesis, we discussed
the particles produced in the prototype laser chamber during the laser ablation of gallium
arsenide (GaAs) material using a nano- and picosecond laser owned by the high-tech
company LPKF Laser & Electronics d.o.o. The theoretical part presents the theoretical
background of the problem, the essential physico-chemical properties of nanoparticles for
the definition of hazards and harmful effects on health, relevant legal regulations, and
technical measures to limit exposure to nanoparticles at the workplace. The experimental
part describes in more detail the sampling and analysis of particles and the assessment of
worker exposure during the laser ablation process. Particle measurements were carried
out with the help of particle capture according to the principle of impaction. For this
purpose, we used a 10-level low-pressure Berner cascade impactor as a sampler, through
which air was pumped and particles of different sizes were captured on foils. We
determined the mass of the particles, which were caught according to their size at each
stage, and thus also the mass concentration of the individual fraction of particles in a cubic
meter of air. We focused mainly on particles below 100 nm, which were captured on the
1st and 2nd stage of the cascade impactor. To define the hazards of potential exposure to
nanoparticles generated during laser ablation, the particles were also examined by
scanning electron microscopy (SEM) equipped with an energy dispersive X-ray detector
(EDS). The size, shape and elemental composition of the particles were analyzed using
SEM-EDS analysis. The size of the generated particles was mostly below 300 nm. During
laser ablation, agglomerates and aggregates of condensation particles were formed.
Gallium (Ga) and arsenic (As) were the main elements in the resulting particles from the
laser ablation of GaAs material. We also observed the formation of arsenic oxide crystals
(As$_2$O$_3$). We found that the potential exposure of workers to particles is low. This is not
a surprising result, since the laser ablation took place in a closed system (i.e., laser
chamber) that includes a point exhaust of air above the laser table and a high-performance
filter system. Based on the findings, we identified deficiencies, or the challenges faced
by the company in the laser ablation process and the possible exposure to nanoparticles,
suggested possible improvements and gave instructions for safe work in the form of a
guideline. |
Sekundarne ključne besede: |
nanoparticles;laser ablation;occupational health and safety;gallium arsenide;Nanodelci;Zdravje in varnost pri delu;Univerzitetna in visokošolska dela; |
Vrsta dela (COBISS): |
Magistrsko delo/naloga |
Študijski program: |
1000378 |
Komentar na gradivo: |
Univ. v Ljubljani, Fak. za kemijo in kemijsko tehnologijo, smer Tehniška varnost |
Strani: |
1 spletni vir (1 datoteka PDF (89 str.)) |
ID: |
24511966 |