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Femtosecond laser processing of quartz wafers for precision cutting of tuning forks
Raffaele De Palo De Palo, Jaka Mur, Matevž Marš, Felice Alberto Sfregola, Pietro Patimisco, Vincenzo Spagnolo, Antonio Ancona, Rok Petkovšek, Annalisa Volpe
Izvirni znanstveni članek
Oznake: femtosecond laser;laser microstructuring;pulse-on-demand;quartz resonator;
In this work, femtosecond laser cutting of quartz wafers was demonstrated as an environmentally friendly alternative to the standard etching methods for production of sensitive sensor devices. The proposed approach employed milling channels for processing of the entire wafer thickness. The laser par ...
Leto: 2026 Vir: Fakulteta za strojništvo (UL FS)
Št. zadetkov: 1
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