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Primary humidity standards for trace water measurements in ultra-high-purity process gases
Domen Hudoklin, Rezvaneh Nobakht, Isidora Radičević, Lucia Rosso, Shahin Tabandeh, Vito Fernicola, Giulio Beltramino, Antonio Castrillo, Rugiada Cuccaro, Regina Deschermeier, Volker Ebert, Livio Gianfrani, Philipp J. Gliese, Stefania Gravina
Izvirni znanstveni članek
Oznake: čistilni plini;temperatura zmrzišča;delež vodne pare;etalon za vlago v sledovih;merjenje vlage v sledovih;spektroskopski analizatorji;ultra-high-purity gases;frost-point temperature;water vapor amount fraction;trace humidity standards;trace water measurement;spectroscopic analyzers;
Trace water is one of the most critical matrix contaminants in ultra-high-purity (UHP) process gases, like argon (Ar), nitrogen (N2), and many others. Even trace amounts can severely degrade the quality of many products that are reliant on these gases. Despite its importance to advanced technology s ...
Leto: 2026 Vir: Fakulteta za elektrotehniko (UL FE)
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