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Št. zadetkov: 2
Empirical enhancement factors for trace moisture in nitrogen and argon
Isidora Radičević, Domen Hudoklin
Izvirni znanstveni članek
Oznake: korekcijski faktor delnega tlaka vodne pare;higrometrija;ultračisti plini;sledovi vlage;higrometer z ohlajenjem zrcala;CRDS;generator vlage;water vapor enhancement factor;hygrometry;ultra-high purity gases;trace moisture;chilled-mirror hygrometer;humidity generator;
Accurate measurement of trace water vapor concentrations in gases is critical across various industries, specifically in semiconductor manufacturing where moisture impurities affect device reliability. The most sensitive and accurate methods for measuring ultra-low trace humidity concentrations, bel ...
Leto: 2025 Vir: Fakulteta za elektrotehniko (UL FE)
Primary humidity standards for trace water measurements in ultra-high-purity process gases
Domen Hudoklin, Rezvaneh Nobakht, Isidora Radičević, Lucia Rosso, Shahin Tabandeh, Vito Fernicola, Giulio Beltramino, Antonio Castrillo, Rugiada Cuccaro, Regina Deschermeier, Volker Ebert, Livio Gianfrani, Philipp J. Gliese, Stefania Gravina
Izvirni znanstveni članek
Oznake: čistilni plini;temperatura zmrzišča;delež vodne pare;etalon za vlago v sledovih;merjenje vlage v sledovih;spektroskopski analizatorji;ultra-high-purity gases;frost-point temperature;water vapor amount fraction;trace humidity standards;trace water measurement;spectroscopic analyzers;
Trace water is one of the most critical matrix contaminants in ultra-high-purity (UHP) process gases, like argon (Ar), nitrogen (N2), and many others. Even trace amounts can severely degrade the quality of many products that are reliant on these gases. Despite its importance to advanced technology s ...
Leto: 2026 Vir: Fakulteta za elektrotehniko (UL FE)
Št. zadetkov: 2
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