towards patterning with curved periodic surface structures
Matej Senegačnik (Avtor), Peter Gregorčič (Avtor)

Povzetek

The quest for miniaturization of devices and control over surface properties motivate rigorous efforts to artificially fabricate surfaces with nanometer features. Here we present a method for fabricating curved, meandering grooves with submicrometer spacing by laser irradiation in liquid. We show that this is possible by using the cavitation bubbles formed during irradiation as diffraction objects to spatially modulate the intensity distribution of the beam, which is imprinted into the top layer of material surface. The bubbles are manipulated with thermo-optical tweezers by thermocapillary forces generated by the temperature gradient in the liquid around the irradiation spot. The presented results show that high viscosity of the liquid, producing laminar flow conditions, provides sufficient stability of the cavitation bubble dynamics for the generation of regular arc-shaped concentric microgroove channels with a depth of several hundred nanometers and a radius of curvature in the micrometer range. Their position is determined by the beam guiding pattern. The results clearly show that cavitation bubbles can be used as an aid in laser ablation in liquids and not just as an undesirable effect, as usually classified in the literature.

Ključne besede

laser ablation in liquids;cavitation bubbles;laser microstructuring;

Podatki

Jezik: Angleški jezik
Leto izida:
Tipologija: 1.01 - Izvirni znanstveni članek
Organizacija: UL FS - Fakulteta za strojništvo
UDK: 532
COBISS: 129205507 Povezava se bo odprla v novem oknu
ISSN: 0169-4332
Št. ogledov: 87
Št. prenosov: 66
Ocena: 0 (0 glasov)
Metapodatki: JSON JSON-RDF JSON-LD TURTLE N-TRIPLES XML RDFA MICRODATA DC-XML DC-RDF RDF

Ostali podatki

Sekundarni jezik: Slovenski jezik
Sekundarni naslov: Matej Senegačnik, Peter Gregorčič
Sekundarne ključne besede: laserska ablacija v kapljevinah;kavitacijski mehurčki;lasersko mikrostrukturiranje;
Vrsta dela (COBISS): Članek v reviji
Strani: str. 1-10
Zvezek: ǂVol. ǂ610
Čas izdaje: Feb. 2023
DOI: 10.1016/j.apsusc.2022.155486
ID: 17080947